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Journal of Vacuum Science and Technology (JVST) B: Nanotechnology and Microelectronics
General information on the online edition:
| Publisher: | American Vacuum Society (AVS) search publisher's open access policy in SHERPA/RoMEO |
| Subject(s): | Electrical Engineering, Electronics and Communications Engineering; Physics |
| Keyword(s): | Vakuumtechnik; Halbleitertechnologie |
| E-ISSN(s): | 2166-2754 |
| P-ISSN(s): | 0734-211X, 1071-1023, 2166-2746 |
| ZDB-Number: | 3117331-7 |
| Fulltext online since: | Vol. 1, Iss. 1 (1983) |
| Homepage(s): | https://pubs.aip.org/avs/jvb |
| Type of appearance: | Fulltext, online and print |
| Pricetype: | subject to fee |
| Annotation: | Hervorgegangen aus: Journal of Vacuum Science and Technology (0022-5355) |
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