Electronic Journals

Social Science Research Center Berlin

by subject | by title | search | contact

  Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) (formerly: Journal of Microlithography, Microfabrication, and Microsystems) (JM3)

General information on the online edition:
search publisher's open access policy in SHERPA/RoMEO
Subject(s):Electrical Engineering, Electronics and Communications Engineering
E-ISSN(s):1932-5134, 2708-8340
Fulltext online since:Vol. 1 (2002)
Type of appearance:Fulltext, online and print
Pricetype:subject to fee
Annotation:1.2002 - 5.2006 u.d.T.: Journal of Microlithography, Microfabrication, and Microsystems.
Please respect the publisher's terms of use.
For licensed journals the usual terms are:
  • Fulltext access is limited to staff and students of the institution.
  • Fulltext articles may be printed or saved solely for private use or for research purposes.
  • Systematic download of articles or search results is prohibited.
  • You are not allowed to pass articles (electronically or printed) to a third party.
List of participating Institutions with fulltext access.