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Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) (formerly: Journal of Microlithography, Microfabrication, and Microsystems) (JM3)
General information on the online edition:
| Publisher: | SPIE search publisher's open access policy in SHERPA/RoMEO |
| Subject(s): | Electrical Engineering, Electronics and Communications Engineering |
| Keyword(s): | Mikroelektronik |
| E-ISSN(s): | 1932-5134, 2708-8340 |
| P-ISSN(s): | 1932-5150 |
| ZDB-Number: | 3056313-6 |
| Fulltext online since: | Vol. 1 (2002) |
| Homepage(s): | https://www.spiedigitallibrary.org/journals/journal-of-micro-nanopatterning-materials-and-metrology |
| Type of appearance: | Fulltext, online and print |
| Pricetype: | subject to fee |
| Annotation: | 1.2002 - 5.2006 u.d.T.: Journal of Microlithography, Microfabrication, and Microsystems. |
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