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Materials Science in Semiconductor Processing
| Licensed for the period: | Elsevier DEAL Core Hybrid: Vol. 153 (2023) - | Readme |
| Licensed for the period: | Elsevier DEAL Freedom Collection: Vol. 1 (1998) - Vol. 152 (2022) | Readme |
| Licensed for the period: | Elsevier DEAL Archive: Vol. 1 (1998) - Vol. 152 (2022) | Readme |
General information on the online edition:
| Publisher: | Elsevier search publisher's open access policy in SHERPA/RoMEO |
| Subject(s): | Electrical Engineering, Electronics and Communications Engineering; Mechanical Engineering |
| Keyword(s): | Halbleitertechnologie,Werkstoffkunde |
| E-ISSN(s): | 1873-4081 |
| P-ISSN(s): | 1369-8001 |
| ZDB-Number: | 2029689-7 |
| Fulltext online since: | Vol. 1, Iss. 1 (1998) |
| Homepage(s): | https://www.sciencedirect.com/journal/materials-science-in-semiconductor-processing https://www.elsevier.com/locate/issn/13698001 |
| Type of appearance: | Fulltext, online and print |
| Pricetype: | subject to fee |
| Annotation: | Volltextzugang über die Datenbank ScienceDirect (kostenpflichtig) |
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